Cryogenic probe stations

Micro-manipulated probe stations used for non-destructive testing of devices on full and partial wafers. Ideal for measuring magneto-transport, electrical, electro-optical, parametric, high Z, DC, RF, and microwave properties. Probe station overview...

CRX-EM-HF

CRX-EM-HF

The CRX-EM-HF is a cryogen-free closed cycle refrigerator (CCR) probe station with a ±0.6 T horizontal, in-plane electromagnet. It can perform all standard C-V, I-V, microwave, and electro-optical probing, plus in-plane horizontal field electromagnetic measurements. Researchers can use it for testing magneto-transport parameters. The probes are configured at 30° angles for accommodating wafers up to 25 mm (1 in) in diameter.

CRX-VF

CRX-VF

The CRX-VF is a cryogen-free CCR probe station enhanced with a ±2.5 T vertical field superconducting magnet. It performs C-V, I-V, microwave, and electro-optical probing, plus out-of-plane vertical field superconducting magnetic measurements. Researchers can use it for performing Hall effect measurements and testing magneto-transport parameters. It provides true 90° wafer probing on wafers up to 51 mm (2 in) in diameter.

CRX-VF with PS‑HM‑8425 Hall measurement package

CRX-VF with PS-HM-8425 Hall measurement package

The CRX-VF with PS‑HM‑8425 Hall measurement package is a complete solution for enabling Hall measurements in a CRX-VF probe station. It supports a range of DC Hall measurements on wafer-scale materials and structures as a function of temperature and field and includes all the instrumentation and software for facilitating Hall measurements. DC fields to 2 T and resistances from 0.5 mΩ to 100 GΩ are supported. The intuitive Hall software provides easy system operation, data acquisition, and analysis.

CRX-4K

CRX-4K

The CRX-4K is our premium cryogen-free CCR probe station. Various options and configurations on the CRX‑4K enable researchers to conduct exacting, challenging test measurements. The CRX‑4K provides Lake Shore’s best low-temperature cryogen-free performance, with configurations enabling sample temperatures as low as 4.5 K. It is designed to accommodate wafers as large as 102 mm (4 in) in diameter, with 51 mm (2 in) diameter probable regions.

CRX-6.5K

CRX-6.5K

The CRX-6.5K is a low-cost, general-purpose cryogen-free CCR probe station. I-V, C-V, and microwave measurements are standard on the CRX-6.5K. It operates over a temperature range of 8 K to 350 K with the option to extend to a higher range of 20 K to 675 K, and accommodates full and partial wafers up to 51 mm (2 in) in diameter.

FWPX

CRX-6.5K

The FWPX accommodates wafers up to 102 mm (4 in) in diameter and can be modified to accept up to 152 mm (6 in) wafers. It employs a continuous refrigeration system using either liquid helium or liquid nitrogen for wafer cooling. It operates over a temperature range of 4.5 K to 475 K with the option to extend the base temperature to 3.5 K. I-V, C-V, and microwave measurements are standard.

EMPX-H2

EMPX-H2

The EMPX-H2 probe station has a ±0.6 T horizontal field electromagnet. All standard C-V, I-V, microwave, and electro-optical probing, plus in-plane horizontal field electromagnetic measurements can be performed on this versatile station. Its probes are configured at 30° angles for accommodating wafers up to 25 mm (1 in) in diameter. The EMPX-H2 can be operated with liquid helium or liquid nitrogen for cooling.

CPX-VF

CPX-VF

The CPX-VF probe station features a ±2.5 T vertical field superconducting magnet. It can do standard C-V, I-V, microwave, and electro-optical probing, plus out-of-plane vertical field superconducting magnetic measurements. It has true 90° wafer probing on wafers up to 51 mm (2 in) in diameter. This continuous refrigeration station uses liquid helium or liquid nitrogen; however, the superconducting magnet requires liquid helium to operate. The CPX-VF operates over a temperature range of 4.2 K to 400 K with the option to extend the base temperature to 2 K.

CPX

CPX

The CPX is Lake Shore’s most versatile, high performance cryogenic probe station. It provides sample temperatures as low as 1.6 K. Ideal applications include research in organics and microwave measurements. Vacuum load-locks are configurable for conducting high-throughput measurements. In addition, the CPX can be configured to enable controlled sample transport under vacuum to the chamber. It accommodates 51 mm (2 in) diameter wafers (up to 102 mm [4 in] optional), and operates with either liquid helium or liquid nitrogen.

TTPX

TTPX

The TTPX is an affordable, entry-level probe station with a compact table-top design. Its continuous refrigeration system uses either liquid helium or liquid nitrogen. The TTPX operates over a temperature range of 4.2 K to 475 K with options to extend as low as 3.2 K or to a higher range of 20 K to 675 K. This model accommodates full and partial wafers up to 51 mm (2 in) in diameter. It is our premium design for electro-optical materials characterization with a backside optical access option and compatible optical sample holders. I-V, C-V, and microwave measurements are standard.

PS-100

PS-100

The PS-100 offers versatile cryogenic testing in a standard, fully specified compact tabletop system, making it ideal for labs with limited funding or who are just starting out. The PS-100 is field-upgradeable for later functionality. It comes preconfigured for sensitive, high-impedance DC measurements, and features a four-arm triaxial TTPX configuration for four-point probing. The PS-100 offers high-stability operation over a temperature range of 4.2 K to 475 K, and accommodates samples up to 32 mm (1.25 in) in diameter.

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